Abstract
We have built and tested a 1 keV electron-beam microcolumn that focuses 1 nA of beam current into a 10 nm full width half-maximum beam diameter at a working distance of 1 mm. The electron source is a miniaturized Zr/O/W Schottky field emitter with 150 μA/sr angular emission current density operating at about 1800 K at a distance of only 100 μm from a silicon membrane extractor electrode. The actual microcolumn is 3.5 mm long assembled mainly from silicon membrane electrodes. Improved einzel lens design and fabrication allowed the operation of this beam focusing element in the accelerating mode. Spherical and chromatic aberrations were reduced by factors of about 2–3, respectively, as compared to the retarding lens mode. Excellent beam current stability with less than 1% variation over several hours has been observed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
