An efficient quasi-multiple medium algorithm fo the capacitance extraction of actual 3-D VLSI interconnects

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In this paper, the quasi-multiple medium (QMM) method based on the direct boundary element method (BEM) is used to extract the capacitance of three-dimensional (3-D) VLSI interconnects with multiple dielectrics. Each dielectric in the 3-D VLSI parasitic capacitor is cut into several fictitious mediums, so it produces much fewer non-zero entries to the total coefficient matrix. As a result, the QMM algorithm can greatly reduce the CPU time and memory space used in the capacitance extraction. To characterize the efficiency of QMM algorithm, we discuss accuracy, storage and timing statistics in comparison with the analogous information from a non-QMM algorithm.