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Abstract
A very economical high vacuum feedthrough and water cooled cathode pedestal and dark space shield assembly were designed and built in our laboratories without requiring any model shop time and without purchasing any expensive material from the outside. The effectiveness of this design to sputter alloys was verified by x-ray spectrographic techniques. During a typical supttering run 5000 V dc at 150 mA could be handled by this cathode assembly and feedthrough without difficulty. This particular feedthrough design was tested successfully in the 10−7 Torr range.
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