Abstract
This paper reports measurements of the shape of the cathode dark space (CDS) of a dc sputtering system. Special attention was given the CDS enveloping the cathode since this region influences the sputtering of the cathode periphery. A Langmuir probe was used to map the CDS negative glow boundary which was found to remain unchanged with cathode-anode spacing until the anode neared the CDS boundary. Glass substrates placed on the anode also influenced the CDS shape. The Langmuir probe current-voltage characteristic changed with time until the probe was completely coated with metal sputtered from the cathode. The coated probe gave reproducible results over a long period of time.
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