Abstract
This work presents a novel and compact method for simultaneously measuring errors in linear displacement and vertical straightness of a moving linear air-bearing stage using 3D sinusoidal-groove linear reflective grating and a novel triangular wave-based sequence signal analysis method. The new scheme is distinct from the previous studies as it considers two signals to analyze linear displacement and vertical straightness. In addition, the tilt motion of the precision linear stage could also be measured using the 3D sinusoidal-groove linear reflective grating. The proposed system is similar to a linear encoder and can make online measurements of stage errors to analyze automatic processes and also be used for real-time monitoring. The performance of the proposed method and its reliability have been verified by experiments. The experiments show that the maximum error of measured tilt angle, linear displacement, and vertical straightness error is less than 0.058°, 0.239 μm, and 0.188 μm, respectively. The maximum repeatability error on measurement of tilt angle, linear displacement, and vertical straightness error is less than ±0.189o, ±0.093 μm, and ±0.016 μm, respectively. The proposed system is suitable for error compensation in the multi-axis system and finds application in most industries.
Highlights
The demand for ultra-precision technology, high-precision multi-degrees-of-freedom displacement measurements for industrial manufacturing and inspection applications is increasing steadily
It has been validated by comparing the experimental results of the tilt angle, linear of linear displacement measurement was less than 0.239 μm
This study proposes a compact and accurate method for a straightforward and reliable means of extracting the tilt angle, linear displacement, and vertical straightness of the precision linear stage
Summary
The demand for ultra-precision technology, high-precision multi-degrees-of-freedom displacement measurements for industrial manufacturing and inspection applications is increasing steadily. High-precision stages are commonly used for semiconductor processing, PCB (Printed Circuit Board) drilling, micromachining, precision assembly, and inspection processing. Measuring and specifying static/quasi-static straightness is a well-established process in existing performance standards [1,2], a standard test for characterizing dynamic straightness of single-axis linear positioning systems has not yet been developed. This is the reason for many new ultra-precision linear positioning systems finding their way into emerging technologies that require exceptional straightness during both static/quasi-static and dynamic positioning. Manufacturers and users of linear positioning systems follow their own methods and standards creating confusion among customers
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