Abstract
This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the photoelectronic inspection module in a three DOF measurement system share the same light source, and the two structures are used to measure linear displacement and straightness errors. The experimental results are utilized to calculate the relevant error parameters according to ISO standards and numerical analysis. They show that after the machine error compensation, the positioning deviation of the system is reduced from 55 μm to 19 μm, corresponding to the reduction of 65%. The accuracy is promoted from 65 μm to 31 μm, about the improvement of 52%. The horizontal and vertical straightness errors of the machine are 4.30 μm and 5.71 μm respectively.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
