Abstract
Vertically and laterally aligned ZnO nanorod arrays were synthesized on Pt-coated Sisubstrates by catalyst-free metal organic chemical vapor deposition. An approach tofabricating chemical sensors based on the nanorod arrays using a coating-and-etchingprocess with a photo-resist is reported. Tests of the devices as oxygen gas sensors have beenperformed. Our results demonstrate that the approach holds promise for the realization ofsensitive and reliable nanorod array chemical sensors.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
