Abstract
An atomic force microscope (AFM) scanning moire technique has been developed and verified in preparation for the measurement of deformations of single point diamond-turned surfaces. It is a non-destructive measurement method without introducing external reference and specimen gratings. This technique has also been successfully applied to measure thermal deformations of electronics packages without introducing an external reference grating. The principle of the formation of an AFM scanning moire and strain measurement using this technique is explained in detail. Several important issues in its applications such as the measuring errors, scanning directions and selection of the number of scan lines are also discussed.
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