Abstract
We report on an accurate analytical model for the squeeze-film damping in laterally oscillating MEMS and MOEMS, which has not been available up to now. The models currently used are not able to correctly predict the damping and underestimate the squeeze- film contribution by a quite large factor of ∼4. This discrepancy was overcome by choosing more appropriate boundary conditions for solving Reynold's lubrication equation which governs the behavior of thin fluid films. The model was tested against numerical FVM computations with the open source software package OpenFOAM as well as measurements of MOEMS test devices with varying width of the squeeze-film gap and is in good agreement with both. This can now be used to increase the efficiency in thedesign step not only of laterally moving microstructures.
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