Amorphous TiOx Films Prepared by Cold Plasma Technique

Abstract

TiOx thin films have been prepared on glasses by using nitrogen cold-plasma was induced by high electrical field and frequency, which deposited on the films surface at 450–550°C for 20 min, and the effect of temperature on the crystallinity, chemical compositions, morphology and optical properties were studied through XRD, EDS, SEM and UV-Vis spectrophotometer, respectively. The films were amorphous. SEM images have shown the films consist of rods shape, which were agglomerated and arrange in a porous microstructure. The optical transmittance of the films responded in the UV region and shifted to shorter wavelength as increasing temperature.