Abstract
Amorphous thermal stability of Al-doped Sb2Te3 films was investigated by high-temperature X-ray diffraction from room temperature to 350 °C, showing the structural evolution step by step from amorphous to crystalline phases. The films' crystallization temperatures were elevated from 124 °C to 244 °C with increasing Al concentrations, resulting in significant improvement of their thermal stability. Formations of Al-Sb and Al-Te bonds in doped films were revealed and further re-validated by ab initio calculation, indicating that Al atoms bonded to Sb and Te atoms to suppress the phase transformation from amorphous to crystalline states.
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