Abstract
Intensified plasma assisted processing is a novel method that uses a triode discharge system to intensify the glow discharge. In this project, this system was investigated across a range of variables to confirm the optimum operating parameters. The aluminium nitride coatings produced by this method were characterized using scanning electron microscopy (SEM), electron dispersion spectroscopy (EDS) and surface micro-hardness tests. The result obtained showed that at the optimum level the aluminium nitride films had a grain size of 8 nm. The hardness in comparison with similar films produced by other traditional plasma processes showed a superior quality. The current results will be directed to establishing ideal parameters for operation.
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