Abstract
Aluminium nitride thin films were prepared by ion beam assisted deposition (IBAD) and the influenceof nitrogen ion beam energy on the microstructure, orientation, surface morphology, optical properties, and durability of the thin films was studied. In the case of synthesis with a low energy ion beam, the films showeda c axis oriented state with a columnar structure and an extremely smooth surface, but the durability against water was weak. In the case of synthesis with a high energy ion beam, the films showed a multioriented state with a granular structure, a roughened surface, and an improved durability against water. It is concluded that the nitrogen ion beam energy plays an important role in synthesising AIN films by the IBAD method, andthat the film structure and properties can be controlled by regulating the ion beam energy.
Published Version
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