Abstract
The relationship between output power and reflectance of the cavity surface was simulated.Simulation results showed that,when the reflectance of cavity surface coatings took the optimum value,the output power of the semiconductor lasers diode reached the maximum.AlN film were deposited on K9 glass substrates by magnetron sputtering using high-purity Al target and N2+Ar.The influence of sputtering conditions,including working pressure,nitrogen concentration,sputtering power on its deposition rate and optical properties has been studied.The optimized AlN coating was used in semiconductor lasers,we found that the COD threshold and the output power have been greatly improved.
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