Abstract
This paper reports an all-quartz high accuracy MEMS absolute pressure sensor based on high Q double-ended tuning fork (DETF) resonator, which is suitable for application in automotive, petroleum, meteorological, aerospace and spacecraft field. etc. The main parts of the MEMS pressure sensor, including the DETF resonator, diaphragm and back cavity structure, are all fabricated by quartz crystal using MEMS process. These pieces are bonded together as ‘sandwich’ structure to form the absolute pressure sensing unit using glass paste under low temperature and vacuum condition. This process could effectively eliminate the thermal stress effect and form the reference vacuum cavity. The experimental results show that the quality factor of the DETF resonator is up to 61000, the sensitivity is up to 7.35Hz/kPa in the operating range 0∼250kPa, the pressure error is only 0.021%FS over the temperature range -40̊C∼+60̊C.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
