Abstract

In this report, we employ an Al-doped ZnO (AZO) layer as a resistive switching layer for transparent resistive switching random access memory devices. An Indium-Tin-Oxide (ITO)/AZO/ITO/glass device exhibits a transmittance of ∼80% (including a glass substrate) in the visible wavelength region and demonstrates reliable bipolar resistive switching behavior over d.c. 300 sweeping cycles with a low operation voltage and a very low variation in the switching threshold voltage. These results indicate that the AZO film is a promising transparent resistive switching layer.

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