Abstract
High entropy alloy nitride coatings promise improved mechanical properties and are under current investigation for a range of applications. In this work, we report deposition of high entropy alloy nitride coatings on 316 stainless steel substrates by inductively coupled plasma assisted dc magnetron reactive sputtering of nominally equiatomic AlCrTaTiZr alloy targets. Characterization of coating composition and structure was carried out through X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, X-ray diffraction, and scanning/transmission electron microscopy. Mechanical testing was conducted through instrumented nanoindentation, interfacial shear loading through micropillar compression, and tension loading of coated microscale tensile bars in a scanning electron microscope. Microscale tension testing offers a potential avenue to assess the limiting shear strength of the coating/substrate interface, as well as the level of cohesion within the coating. The present study indicates that microscale tension tests yield results consistent with macroscale testing, while avoiding the need for multiple macroscale specimens. The present results suggest that cohesion of the high entropy alloy nitride coating and limiting shear strength of the coating/steel interface both increase with increasing substrate bias voltage during deposition, and that these coatings may be more adaptive to increased levels of ion bombardment during deposition without inducing excessive residual stresses.
Published Version
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