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PDF Availablehttps://doi.org/10.6117/kmeps.2015.22.3.019
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Cite Publication Date: Sep 30, 2015 |
Affiliation: Dankook University
Al 및 SiN 박막 위에 형성된 TiW Under Bump Metallurgy의 스퍼터링 조건에 따른 Au Bump의 접착력 특성
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