Abstract

AbstractExtremely small bandpass filters with TFBARs using aluminum nitride piezoelectric material have been realized in this study. Resonator modeling has been performed based on the modified Butterworth–Van Dyke (MBVD) model from the measured frequency responses of a single resonator. The predicted filter responses are compared with measured frequency data. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 34: 386–387, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10470

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