Abstract
Aimed at portable application, a new integrated process chip for thin film bulk acoustic resonator (FBAR) mass sensor is proposed and verified with 0.18 um CMOS processing in this paper. The longitudinal mode FBAR with back-etched structure is fabricated, which has resonant frequency 1.878 GHz and Q factor 1200. The FBAR oscillator, based on the current-reuse structure, is designed with Modified Butterworth Van Dyke (MBVD) model. The result shows that the FBAR oscillator operates at 1.878 GHz with a phase noise of -107 dBc/Hz and -135 dBc/Hz at 10 KHz and 100 KHz frequency offset, respectively. The whole process chip size with pads is 1300 µm × 950 µm. The FBAR and process chip are bonded together to sense tiny mass. The measurement results show that this chip precision is 1 KHz with the FBAR frequency gap from 25 kHz to 25MHz.
Highlights
In recent years, mass sensor based on film bulk acoustic resonator (FBAR) technology has a rapid development due to its high mass sensitivity and integrated potential [1]
We presented an integrated chip, which can be connected with FBAR to process its RF sensor signal and show mass change value directly
This tiny mass sensor signal processing circuit has high accuracy, but sometimes there is an accidental error of ±1000 Hz, which is related to the synchronization of high speed counter trigger
Summary
Mass sensor based on FBAR technology has a rapid development due to its high mass sensitivity and integrated potential [1]. FBAR mass sensor is considered as an excellent portable healthcare sensor resolution [2, 3]. FBAR mass sensors are handled with network analyzer and RF probe station, which is massive and various with testing environment. There is no paper to report FBAR sensor signal processing chip and its FBAR oscillator. We presented an integrated chip, which can be connected with FBAR to process its RF sensor signal and show mass change value directly
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
