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https://doi.org/10.1109/t-ed.1968.16421
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Cite Publication Date: Sep 1, 1968 | |
 Citations: 1 |
Affiliation: RTX (United States), HRL Laboratories (United States)
The comparison of air-gap isolated integrated circuits with conventionally fabricated circuits shows the advantage of the "beam-lead concept." Utilizing the anisotropic etching properties of single crystalline silicon in the
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