Abstract
Based on the results of X-ray structural analysis, changes in the crystalline structure that occurred during 15 years in surface layers of epitaxial films of iron-yttrium garnet implanted by B+ ions were studied. The processes that occur during the B+ ion implantation of in ferrite-garnet films, and the processes that accompany the low-temperature aging of ion-implanted films are considered. Strain profiles were determined from the experimental rocking curves, obtained immediately after ion implantation and after 15 years. It was found that the value of relative maximum deformation of surface layers decreases at constant thickness of the disturbed layer.
Highlights
The development of durable and reliable instruments made on the basis of epitaxial heterostructures is one of the most problems of semiconductor technology
The aim of this work is to establish the patterns of aging processes at room temperatures in films of ironyttrium garnet implanted by boron ions
For the analysis of the processes that occur during the natural aging of ion-implanted layers of iron-yttrium garnet films, it is necessary to consider processes that occur during ion implantation, and processes that accompany low-temperature aging after ion implantation
Summary
The development of durable and reliable instruments made on the basis of epitaxial heterostructures is one of the most problems of semiconductor technology. The technical characteristics of the device to a large extent are determined by the profiles of the concentration of implanted impurities and radiation defects and, the strain profile. The restructuring and migration of defects in the crystalline lattice during the operation and storage of ion-implanted ferritepomegranate films are the main factors that lead to changes in the operational characteristics of the devices where they are used. Studying the time stability of the structural parameters of the disturbed layer, establishing the regularities of the restructuring of the crystalline structure at room temperatures and predicting their behavior in the process of exploitation is an important theoretical and practical task. The aim of this work is to establish the patterns of aging processes at room temperatures in films of ironyttrium garnet implanted by boron ions. The structure of this article includes both parts of the research in these areas
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