Abstract
Based on the results of X-ray structural analysis, changes in the crystalline structure during natural aging and laser annealing, which occurred in near-surface layers of epitaxial films of LaGa-substituted Iron-Yttrium Garnet, implanted by F+ ions, were studied. The processes that occur during the ion implantation by F+ in ferrite-garnet films, and the processes that accompany the low-temperature aging of ion-implanted films are considered. From the experimental rocking curves, obtained immediately after ion implantation, after the laser irradiation and after several years, strain profiles were determined. Two stages in the changes of the crystalline structure of the nearsurface disturbed layer over time are revealed. During the first of them, the maximum deformation in the ionimplanted layer increased slightly, and on the second it decreased. It was established that the results of laser annealing and natural aging of near-surface layers implanted by F+ ions and laser irradiated LaGa:YIG films depend on the direction from which laser irradiation occurred. However, the result of their total exposure does not depend on the side of laser irradiation.
Highlights
Ion implantation leads to defects in the near-surface layer and, change in the interplanar distance in it, and to changes in all properties of the materials [1]
The change over the time of physical properties is typical for all the materials [2], including radiation resistant as ferrite garnets, and the restructuring and migration of defects in the crystal lattice during the exploitation are the main factors that lead to changes in the exploitative characteristics of devices with implanted epitaxial ferrite-garnet films
The purpose of this work was to study the time stability of structural parameters of near-surface layers of epitaxial films of ferrite garnets implanted by F+ ions and establish the regularities of their crystalline structure rearrangement during aging at room temperatures and similar aging after laser annealing
Summary
Ion implantation leads to defects in the near-surface layer and, change in the interplanar distance in it, and to changes in all properties of the materials [1]. It is important to study the time stability of the structural parameters of the modified layer, establish the regularities of the restructuring of their crystalline structure during aging at room temperatures and predict their behavior during the process of exploitation. The purpose of this work was to study the time stability of structural parameters of near-surface layers of epitaxial films of ferrite garnets implanted by F+ ions and establish the regularities of their crystalline structure rearrangement during aging at room temperatures and similar aging after laser annealing
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