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Abstract
Polycrystalline ZnS films were grown from ZnCl 2 and H 2S on glass and mica using the atomic layer epitaxy (ALE) technique. Morphological and crystalline changes during the ALE growth of ZnS were studied by AFM and XRD. AFM measurements revealed that substantial agglomeration took place in the beginning of the growth. On glass the nucleation density of ZnS was higher than on mica and consequently the films on glass remained smoother than those on mica. XRD measurements revealed that orientation of the films was stronger on mica than on glass.
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