Abstract
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors.
Highlights
Cardiovascular diseases are the predominant cause of mortality worldwide [1,2]
Patients diagnosed with ischemic heart diseases (IHD) are commonly subjected to a surgical procedure called percutaneous coronary intervention (PCI), in which the regular blood-flow in a clogged vessel is usually restored and maintained by the implantation of a biocompatible mesh tube or Stent
The atomic force microscope (AFM) has been configured in contact mode to apply a concentratedTfwoorcperootontythpeescoefnMteErMoSf stehnesotrospwpitlhatdeifofefrethntegseeonmseotrri,eisn(coirrcduelarrtaonodbstqauianrea) fhoarvceebveeenrsus piezo submitted to AFM characterization, and the resulting experimental data have been compared with simulation results developed on both analytical and finite element (FE) models
Summary
Cardiovascular diseases are the predominant cause of mortality worldwide [1,2]. The 2013 Global Burden of Disease study estimated that they were responsible for more than double the deaths than that caused by cancer. In the European Union alone, they accounted for almost 40% of all deaths in 2013, and ischemic heart diseases (IHD) alone were responsible for more than 35% of deaths. These conditions are caused by the accumulation of fatty deposits lining the inner wall of a coronary artery, restricting blood flow to the heart. Patients diagnosed with IHD are commonly subjected to a surgical procedure called percutaneous coronary intervention (PCI), in which the regular blood-flow in a clogged vessel is usually restored and maintained by the implantation of a biocompatible mesh tube or Stent. The proposal of intelligent stents (iStent) endowed with blood-flow and/or pressure sensing capabilities represents a potential economic solution that, must be reliable, efficient, compact, low-power, and less expensive than its counterparts to be considered as an actual alternative
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