Abstract
AES spectra were obtained from elements of the first row of the transition metals using a Perkin Elmer 595 Scanning Auger Microprobe. The goal was to obtain spectra which represented what would normally be obtained under typical operating conditions. Auger spectra were take from Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, and Ge samples under identical conditions. Each elemental spectrum was obtained with electron beam energies 3, 5, and 10 keV using a 1 μA electron beam. A Cu sample was also used to obtain data in calculating the signal-to-noise ratio and in checking instrument calibration. Signal-to-noise ratios were obtained using the primary Cu LMM peak located at 916 eV. The signal-to-noise ratios were measured before and after analysis and were 20, 30, and 70 for electron beam energies of 3, 5, and 10 keV, respectively. The instrumental energy resolution used for all of these measurements was 0.6% ± 0.03%.
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