Abstract
Novel highly sensitive AeroMEMS sensor arrays for transient wall pressure and wall shear stress measurements in fluid flows are presented. Sealed through silicon vias (TSV) and the employment of an elaborate mounting technique enable to electrically contact the sensor chips from the back side. Hence, flow disturbing bond wires on the front side are avoided when chips are mounted flush with the measured surface. The integration of a pressure and a wall hot-wire sensor on a single chip makes simultaneous pressure and wall shear stress measurements possible. The sensors suitability for measurements of fluctuations up to at least 19 kHz is demonstrated in a high-frequency laminar to turbulent transition experiment in a transonic wind tunnel. A complex 3D multi-sensor array has been developed employing 154 pressure sensors to gain extensive, precise and transient data about the surface pressure on a cylinder. Wind tunnel experiments are conducted at a Reynolds number of 2∙105.
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