Abstract
Piezoelectric pump design is regarded as a hot research topic in the microfluidic field, and has been applied in liquid cooling, precision machinery and other relevant domains. The valveless piezoelectric pump becomes an important branch of the piezoelectric pump, because it successfully avoids the problem of “pump-lagging of valve” during the valve piezoelectric pump processing. This paper summarizes the development of valveless piezoelectric pumps, and introduces some different configurations of valveless piezoelectric pumps. The structure and material of all kinds of valveless piezoelectric pumps are elaborated in detail, and also the output performance of the pump is evaluated and analyzed with the variations in flow rate and output pressure as reference. By comparing the flow of different types of valveless piezoelectric pumps, the application of valveless piezoelectric pumps is also illustrated. The development tendency of the valveless piezoelectric pump is prospected from the perspective of structure design and machining methods, which is expected to provide novel ideas and guidance for future research.
Highlights
Since Narasaki [1] designed the first piezoelectric pump in 1987, this started the research and expanded the application field of pumps
According to the current research status, the valveless piezoelectric pumps are divided into three different groups, including valveless piezoelectric pump with external flow tubes, valveless piezoelectric pump with built-in structures, as well as the bionic valveless piezoelectric pump
The flow rate and output pressure acting as comparison parameters, the output characteristics of each valveless piezoelectric pump is analyzed
Summary
Since Narasaki [1] designed the first piezoelectric pump in 1987, this started the research and expanded the application field of pumps. Built-in structural valveless piezoelectric pump is the flow resistance structure placed inside the pump chamber, common examples include unsymmetrical slope elements [26], hemisphere-segments [27], and conical spiral cavities [28], etc. Piezoelectric pump realizes the one-way flow of fluid by using a piezoelectric vibrator based on the application of valveless piezoelectric pumps in various fields, this paper and special for instance, nozzle/diffuser tubes [22], spiral reviews thepipe; research progress. The flowThe resistance structure placed inside theand pump chamber, common examples ininfluences of material properties structure on pump performance are clude unsymmetrical slope elements [26], hemisphere-segments [27], and conical spiral introduced, and the valveless piezoelectric pump is systematically summarized. The future development direction of valveless piezoelectric pump technology is predicted, and the foundation is laid for further promotion
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