Abstract
New developments in optical measurement techniques have made it possible to test the surface quality on grazing incidence optics with extreme precision and accuracy. An instrument developed at Brookhaven, the Long Trace Profiler (LTP), measures the figure of large (up to 1 m long) cylindrical aspheres with nanometer accuracy. The LTP optical system is based around a common-path interferometer design belonging to the class of slope measuring interferometers and, as such, it is very robust, stable, and vibration insensitive. A unique error correction technique removes the effect of tilt errors in the optical head as it traverses the air bearing, thus allowing one to accurately measure the absolute surface profile and radius of curvature. This is of critical importance to the manufacture of long-radius spherical optics used in high-resolution soft x-ray monochromators and in the testing of mirror bending systems. This talk will review the principle of operation of the LTP, probe the factors limiting the performance of the system, and will examine the current state of the art in synchrotron radiation mirror manufacturing quality (as viewed by our metrology techniques). This research was supported by the U.S. Department of Energy Contract No. DE-AC02-76CH00016.
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