Abstract
The development of a charged coupled device (CCD)-based detector for the acquisition of high quality backscattered electron Kikuchi patterns (BEKP) has allowed crystallographic phase identification studies to be conducted in the scanning electron microscope (SEM). High quality BEKPs suitable for analysis have been obtained from a wide variety of materials. Phase identification through a combination of BEKP and energy dispersive x-ray spectrometry (EDS) has been performed with relatively little specimen preparation compared to electron diffraction in the transmission electron microscope. This paper will discuss the measurement of the depth resolution of the BEKPs. Crystallographic phase identification through a combination of BEKP and energy dispersive x-ray spectrometry is demonstrated by the identification of a Laves phase in an Fe-Ni-Cr-Nb alloy. The CCD-based detector has been described in detail previously and will not be discussed here. The thickness of the surface region that gives rise to the BEKP has been reported to be quite thin, thus requiring care in surface preparation.
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