Abstract

The development of a new charge coupled device (CCD)-based detector for the scanning electron microscope (SEM) has allowed high quality backscattered electron Kikuchi patterns (BEKP) suitable for crystallographic analysis to be collected. These BEKPs can be used for crystallographic texture, phase and microstress analysis. This CCD detector system, can also be equipped with a special filter for removing backscattered electrons, which allows us to image low intensity, highly divergent x-ray diffraction (Kossel) patterns. The Kossel patterns are utilized for the accurate measurement of d-spacings suitable for residual stress and lattice parameter measurements. 19 refs., 4 figs.

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