Advances in Atomic-Scale Frictions with Stick-Slip and Super-Lubricity

Wang Xiang,Mao Scott X

doi:10.35840/2631-5076/9269

Abstract

With the development of Micro-/Nanoelectromechanical systems (MEMS/NEMS), the friction problems at micro/nanoscale induced the failure of many devices in MEMS. The basic model of atomic-scale friction and associated advancement of experimental research were reviewed in this paper. Two common atomic-friction behaviors, i.e. stick-slip and super-lubricity friction were also discussed here. Challenges and promising points for future research in atomic-scale friction were enumerated.

Highlights

Micro-/nanoelectromechanical systems (MEMS/NEMS) are an important part of the integrated circuit industry and MEMS/NEMS devices like accelerators and resonators have been extendedly applied from the aerospace, automobile industry to the biomedical industry [1]
Investigating the friction mechanism is critical to control the damage of devices and improve the feasibility and reliability of MEMS/NEMS like polysilicon microactuators in the magic disk [12], silicon accelerometer in the sensory system [13], polysilicon micro-motors
The P-T model provides a simple theory to understand the atomic friction and the developed model can be applied to explain two typical atomic-friction behaviors, i.e. the stick-slip and superlubricity. They have been reported by much experimental research through atomic force microscopy (AFM)-based technology

Summary

Introduction

Micro-/nanoelectromechanical systems (MEMS/NEMS) are an important part of the integrated circuit industry and MEMS/NEMS devices like accelerators and resonators have been extendedly applied from the aerospace, automobile industry to the biomedical industry [1]. The theoretical model about single-asperity atomic friction was introduced, and related experimental research about two typical friction behaviors including the stick-slip and superlubricity were reviewed. In general, the The theoretical model of atomic-scale friction contact surface in real crystal materials has a two-

Results

Conclusion