Advancement of micro/nanotechnology research in Institute of Precision Engineering of Xi'an Jiaotong University

Abstract

Micro/nanotechnology research in Institute of Precision Engineering (IPE) of Xi'an Jiaotong University falls into five parts as below: fabrication of microsensors, fabrication of Ultramicroelectrodes (UMEs), study on mechanical behaviours of Microelectromechanical System (MEMS) materials, fabrication of nanoscale length-intensive standard sample, as well as microengine. (1) Based on different micro/nano process techniques, MEMS pressure sensor, inertial sensor, multisensor as well as UMEs were fabricated. (2) With enhancing the performance of the instrument and modifying measurement mathematical model, the improving accuracy of measurement and certainty of the result of the mechanical behaviours of MEMS materials were obtained. (3) AFM tip-induced oxidation process as well as multilayer films deposition technique were employed to fabricated nanoscale linewidth standard sample. (4) Design and analysis of microsliding rotor engine and microreciprocating piston engine.