Abstract
Surfaces with steep flanks and varying reflective properties are usually not measurable with conventional surface measurement techniques, even though there is an ongoing miniaturization of components and rising demand for automation in industry. A solution can be provided by “Focus Variation”, a new optical measurement technique that allows the robust measurement of complex surfaces with vertical resolutions up to 10 nm. In addition to topographic data, true colour information that is perfectly registered to the height data is obtained. The optical 3D measurement device “InfiniteFocus” is based on this new technology and provides a significant improvement in quality assurance. Allowing surface measurements in the micro and nano range as well as relatively large components, the Instrument can be used in the lab and as a measurement tool during production.
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