Abstract
An advanced model of two- and three dimensional (2D and 3D) heat and mass transport coupled with surface chemistry and gas-phase clustering is developed for simulating the growth of barium strontium titanate BaSrTiO 3 (BST) thin films by metal-organic chemical vapor deposition (MOCVD) from bis(dipivaloylmethanato)barium Ba(DPM) 2, bis(dipivaloylmethanato)strontium Sr(DPM) 2, and titanyl bis(dipivaloylmethanato) TiO(DPM) 2. Verification of the model is carried out by comparison of the computations with the available experimental data. The model predicts reasonably the key trends observed in experiments. In particular, the particle formation in the gas-phase is enhanced with the susceptor temperature, and the gas-phase clustering is suppressed at low oxygen flow rates. The model is applied to the simulation of the BST growth in Tricent ® reactors.
Published Version
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