Abstract
1. IntroductionIn the materials sciences as well as in the life sciences energy-dispersive x-ray microanalysis (EDX) in the transmission electron microscope (TEM) is now established as a routine investigation method allowing high-sensitivity qualitative and quantitative element detection. The accuracy of the results obtained and the measurement time needed are largely determined by the following properties of the TEM used: shape of the objective lens pole-piece and design of the illumination system, collimation of the beam path and operation flexibility of the illumination system.2. Optimized X-ray detectionIn the EM 910 the design concept of the objective lens allows the x-ray detector to be placed closer to the specimen than usual (Fig. 1). Therefore an extremely high solid angle (i. e. 0.192 sr) of the x-ray signal can be intercepted by a 30 mm2-detector at a take-off angle of 20°. As a result, x-ray spectra can be acquired with a high countrate and a clearly improved signal-to-noise ratio. Element distribution maps with much improved information density can be acquired in the usual registration times.
Published Version
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