Abstract
AbstractWe have shown previously the results from out-of-plane and in-plane X-ray scattering /diffraction measurements together with transmission electron microscope and X-ray reflectance measurements and shown that they are effective in characterization of a periodic porous silica low-k film [1]. In the present work, we report the results on pore-size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure.
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