Abstract
The effects of the pore size distribution (psd) and pore position distribution (ppd) of two-dimensional (2D) periodic porous silica films on dielectric constant (k) and elastic modulus (E) were investigated by theoretical calculations. It was found that such porous silica films with a wider psd or a wider ppd show lower E value than 2D hexagonal periodic porous silica films with an identical pore size. Careful control of pore structure is necessary for obtaining ultralow-k porous silica films with a high E.
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