Adsorption of Atomic Hydrogen on the Si(100)-(2×1)-Sb Surface

Abstract

The structural change of a Si(100)-(2×1)-Sb surface caused by atomic hydrogen adsorption at room temperature and 100°C was studied using time-of-flight impact collision ion scattering spectroscopy (TOF-ICISS) and low energy electron diffraction (LEED). In this study, we found from the change of TOF-spectra and α-scans that when atomic hydrogen adsorbs on the Si(100)-(2×1)-Sb surface, (1) a structural transformation from (2×1) to (1×1) occurs, (2) Sb atoms existing on the Si(100) surface partly desorb even at room temperature, and (3) the rest of the Sb atoms are displaced from their original positions and form an almost two-dimensional layer with dispersive distribution of Sb atoms. These results are different from those for other metal adsorbates/Si systems reported previously.