Abstract
ABSTRACTThis study demonstrates that thin metallic oxide layers, such as OsOx and ZnO, function as a strong adhesion layer between Cu film and glass substrate. The adhesion strength was studied with a micro-scratch tester and the films and interfaces were characterized by energydispersive X-ray spectrometry. The presence of an extremely thin intermixing layer was confirmed at the metal/glass interfaces. The formation of such an interfacial layer increased the adhesion strength significantly.
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