Abstract
The random walk and capture of active species responsible for various processing modifications of porous low dielectric constant materials is studied. It is shown that in the model of cylindrical inclusions with different diffusion coefficients the mean square displacement of diffusing species depend on the time in a logarithmic way. Due to two-dimensional character of the traps the concentration of the species, which captured in traps, is described by logarithmic law too. The results can be applied for the description of various technological processes including participation of active species.
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