Abstract
The efficiency of gallium nitride layer ablation when exposed to pulses of a KrF laser through a layer of sapphire is investigated. The resulting dependences of the evolution of acoustic emission upon varying the laser pulse energy density are of a threshold nature, allowing us to control the efficiency of ablation and the quality of gallium nitride crystals separated from a sapphire substrate.
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Schedule a callMore From: Bulletin of The Russian Academy of Sciences: Physics
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