Abstract
Optical property changes of newly developed silica by both KrF and ArF excimer laser irradiation will be reported. X-2-01 has been provided for high power laser application for several years and has proved its high performance against KrF laser irradiation. The new material X-1-04 shows superior optical stability in transmittance and refractive index change by KrF and ArF laser irradiation. The application of these materials will be discussed considering their properties of geometry, homogeneity, and laser resistance.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
