Abstract
Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acoustic waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitted from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal of surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, can be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser cleaning process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning process.
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