Achievement of Critical and Limiting Parameters in Surface Acoustic Wave Microdevices

Abstract

Currently, acoustoelectronics devices (filters, delay lines, resonators, etc.) are used in various radio engineering systems. In addition, they are used in microsystem technology as the basis for microminiature sensors for various purposes — sensors ofphysical quantities (temperature, micro-displacement, acceleration, etc.). In the range from tens of megahertz to 2.5 GHz, surface acoustic wave micro-devices have become widespread. The field of technical applications of SAW micro-devices is rapidly developing. In order to withstand competition from other technologies, it is clear that it requires not only the improvement of common topological solutions, but also the development and research of new designs of SAW micro-devices capable of reaching limiting and critical parameters. It is also necessary to use modern methods and approaches to device modeling. Purpose: to review and analyze the problems of the current state of SAW devices from the point of view of achieving limit parameters. Results: It is shown that the stages of structural and parametric synthesis of topology are key aspects in the design of devices with limiting parameters. Some results of research and development of surface acoustic waves devices based obtained in the field of creating ultra-narrowband filters, ultra-wideband delay lines and unique radio tags based on a multi-band coupler are presented. A filter with minimal unevenness of the group delay time for a class of transversal filters is presented. It is shown that obtaining devices with limiting and critical parameters is possible only on the basis of interfacing the development of structural and technological, materials science, physical and circuit design principles. Modern approaches to analyzing the output characteristics of surface acoustic wave devices and wave processes in piezoelectric substrates are described.