Accuracy Improvement for Scattering-Parameters Evaluating of Microwave Coplanar Probe Using One-Port Two-Tier Multi-TRL Calibration Method

Abstract

This paper presents a method improving accuracy for evaluating S-parameters (Scattering-parameters) of MCP (Microwave Coplanar Probe). This method may be named one-port two-tier Multi-TRL (Thru-Reflect-Line) calibration method. It measures two-port devices only at one port of VNA (Vector Network Analyzer). It decreases the random errors caused of cable movements and connecting times. This method is implemented with coaxial OSL (Open-Short-Load) and on-wafer TRL calibration kit. It directly calculates and removes the residual errors caused of coaxial OSL calibration kit imperfection. It significantly reduced system errors by using on-wafer TRL calibration kit. To verify the effectiveness of the proposed method, the measured S-parameters up to 50GHz of MCP configured with GSG-100 are given and discussed.