Accuracy Evaluation of Representative Figure Method for Proximity Effect Correction

Abstract

The correction accuracy of the representative figure method is studied. In order to evaluate pattern size deviation using the small area size as a parameter, we carry out a systematic experiment using a 0.2 µ m line-and-space pattern. It is found that the small area size of an element and a reference rectangle can be maximized at 5 µ m and 15 µ m, respectively, to suppress the pattern size deviation below 10%, or 0.02 µ m. The large area sizes obtained here result in the reduction of calculation time for correction. The correction time itself can be reduced to 1/16 of that in our previous work. When a 4 CPU (50 MIPS per CPU) computer is used, the total calculation time can be completed in less than 15 min for a chip of 15×15 mm2 size.