Accuracy and Precision f Quantitative X-Ray Microanalysis in the Environmental Scanning Electron Microscope (ESEM)

Abstract

This paper presents the results of studies concerning the accuracy and precision of x-ray microanalysis (EDS) in the environmental scanning electron microscope (ESEM). The ESEM is distinguished by its use-of gas in the microscope specimen chamber for imaging and for charge neutralization. Previous work on EDS-ESEM has concentrated either on qualitative x-ray microanalysis or on correction methods to the enlarged x-ray spatial resolution due to the electron skirt. Recent work shows that quantitative analysis is possible once charge neutralization can be accomplished in practice.Accuracy and precision were evaluated in the work presented here using NIST SRM 482 (goldcopper alloys) and NIST SRM K411 (glass beads). The gold-copper alloy wires were prepared by mounting them in epoxy mounts and polishing to a metallurgical finish. The glass spheres were prepared by sprinkling a small amount of the sample onto double-sided carbon tape mounted onto an aluminum SEM stub.