Abstract

A thermal sensor has been developed at IMTEK to perform flow measurement and fluid characterization. It features low power consumption and a simple geometry. By means of numerical simulations it is shown that alternating electric excitation at high frequency (200 Hz) makes possible the identification of common gases flowing in a microfluidic channel by measuring the amplitude of the temperature oscillations at the central location of the sensor. Additionally, flow measurement is achieved up to 0.1 m/s.

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