Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer.

Abstract

Absolute physical thickness across the sample aperture is critical in determining the index of a refraction profile from the optical path length profile for gradient index (GRIN) materials, which have a designed inhomogeneous refractive index. Motivated by this application, instrumentation was established to measure the absolute thickness of samples with nominally plane-parallel surfaces up to 50mm thick. The current system is capable of measuring absolute thickness with 120nm (1σ) repeatability and submicrometer expanded measurement uncertainty. Beside GRIN materials, this method is also capable of measuring other inhomogeneous and opaque materials.